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Description of the Dataset This repository contains the experimental data and simulation files associated with the study “Parallel Kinetic Pathways in Arsine Generation: Oxygen Modulation and Mechanistic Evidence in FIAS Systems.” The data support the mechanistic interpretation that arsine generation proceeds through two kinetically distinct pathways, strongly modulated by the gaseous environment and the oxidative behavior of borane-type intermediates. The Excel sheets included here contain time‑resolved absorbance profiles, experimental conditions, and simulation outputs used to analyze: The coexistence of two kinetic pathways under air as carrier gas. The formation of single vs. dual peak profiles depending on the gaseous environment (air vs. argon). The effect of oxygen flow, pumping rate, and carrier gas composition on signal shape and temporal behavior. The stability of arsenic‑bearing species during atomizer shutdown. The construction and validation of simulation models for hydride formation and transport. 2. File Inventory The repository includes several Excel files, each containing one or more sheets with experimental or simulated data. The sheet names correspond to specific experimental conditions: Actual data and simulation for 80 RPM, with air as carrier, H₂O and HCl Time‑resolved profiles and simulation outputs under air with different liquid phases. Actual data for 80 RPM profiles with carrier Argon Experimental signals showing single‑peak behavior under inert atmosphere. Actual data for the profiles at 100 and 120 RPM, with Argon as the carrier Comparison of rotational speeds and their effect on arsine transport. Actual data from the profiles for changes in the flow of Ar as an inert entrained gas Influence of argon flow rate on peak position and shape. Real data and simulation for 120 RPM, with air as carrier, H₂O and HCl; simulation construction Combined experimental and modeled profiles illustrating oxygen‑dependent acceleration. Real data of the As profiles as a function of airflow as a carrier Effect of increasing oxygen availability on the dual‑peak structure