Cascaded Polynomial and MLP Regression for High-Precision Geometric Calibration of Ultraviolet Single-Photon Imaging System

To meet the requirements of quantitative elemental analysis in the ultraviolet (UV) spectrum, a UV single-photon imaging system was developed, integrating a digital micromirror device (DMD) and a single photon-counting imaging detector, enabling high sensitivity, high resolution, and a wide dynamic range. However, intrinsic geometric distortion poses a significant challenge to accurate spectral calibration. A hybrid correction framework is proposed, cascading polynomial coarse correction with multilayer perceptron (MLP) fine regression, improving calibration accuracy. The method utilizes a full-field dot-array mask projected by the DMD to acquire distortion-reference image pairs. The polynomial model rapidly captures the dominant high-order distortion, while a lightweight MLP performs non-parametric fine regression of residual displacements, achieving a mean error of 0.84 pixels. This approach reduces the root mean square (RMS) error to 1.01 pixels, outperforming traditional direct linear transformation (5.35 pixels) and pure polynomial models (1.33 pixels), while the nonlinearity index decreases from 0.35° to 0.05°. In addition, the method demonstrates stable performance across multi-scale checkerboard patterns ranging from 128 to 280 pixels, with RMS errors remaining around the 1-pixel level. These results validate the high-precision distortion suppression and robust cross-scale performance of the proposed framework. By leveraging DMD-generated patterns for self-calibration, this method eliminates the need for external targets, offering a scalable solution for high-end spectrometer calibration.