MEMS Rogowski Coil Current Sensor with Radially Formed Spiral Return Coil

The Rogowski coil current sensor has the advantage of being able to measure large currents linearly and with small temperature fluctuations. Furthermore, we select the Rogowski coil this study because of its high compatibility with MEMS and semiconductor processes. We have previously reported the development of a MEMS Rogowski coil current sensor that employs a TSV (Through Silicon Via) structure using a silicon substrate. Although this MEMS Rogowski coil can detect current linearly, it has problems with low detection sensitivity and low cancellation effect of external magnetic fields. In this study, to solve these problems, we developed a Rogowski coil current sensor with a radially formed spiral return coil. For comparison, we also fabricated a glass substrate type in addition to the silicon substrate type, and we report the comparison of basic characteristics.