Sequential growth of rocksalt-structured MgZnO/MgO superlattice with abrupt interface by alternating precursor supply in mist CVD

Abstract Rocksalt (RS)-structured Mg 0.95 Zn 0.05 O/MgO double-hetero and ten-period RS-Mg 0.85 Zn 0.15 O/MgO superlattice (SL) structures were fabricated on MgO (100) substrates using a custom-built mist CVD system equipped with an alternating precursor supply system. The SL exhibited +1st, 0th, -1st, and -2nd order satellite peaks near the 200 diffraction peak in the X-ray diffraction θ-2θ pattern, and cross-sectional scanning transmission electron microscopy confirmed abrupt heterointerfaces. Reducing substrate temperature fluctuation when changing the precursor mist supply was crucial to obtaining abrupt heterointerfaces in mist CVD.