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Texture and hillocking in sputter-deposited copper thin films

200212 citationsJournal Article

Authors

R. Jakkaraju · SPTS Technologies (United Kingdom)

A.L. Greer · University of Cambridge

Topics & Keywords

Copper Interconnects and Reliability Metal and Thin Film Mechanics Semiconductor materials and devices

UN Sustainable Development Goals

Life in Land

Publication Details

Published in: Journal of Materials Science Materials in Electronics

Volume 13, Issue 5, pp. 285-294

DOI: 10.1023/a:1015567807526

Field-Weighted Citation Impact: 1.26

Texture and hillocking in sputter-deposited copper thin films | Researchclopedia