On-axis radio frequency magnetron sputtering of stoichiometric BaTiO3 target: Localized re-sputtering and substrate etching during thin film growth
201517 citationsJournal Article
Field-Weighted Citation Impact: 0.56
On-axis radio frequency magnetron sputtering of stoichiometric BaTiO3 target: Localized re-sputtering and substrate etching during thin film growth | Researchclopedia