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The Cutting Edge of Plasma Etching

200844 citationsJournal Articlegreen Open Access

Authors

Thorsten Lill · Applied Materials (United States)

Abstract

International audience

Topics & Keywords

Plasma Diagnostics and Applications Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research

Publication Details

Published in: Science

Volume 319, Issue 5866, pp. 1050-1051

DOI: 10.1126/science.1153901

Field-Weighted Citation Impact: 3.00

The Cutting Edge of Plasma Etching | Researchclopedia