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Thorsten Lill | Researchclopedia

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Thorsten Lill

Lam Research (United States)ORCID

104

Works

1,950

Citations

22

h-index

36

i10-index

Research Topics

Semiconductor materials and devices Plasma Diagnostics and Applications Electronic and Structural Properties of Oxides

Affiliations

Argonne National Laboratory1994–1994

Centre National de la Recherche Scientifique2010–2010

University of Freiburg1993–1993

University of California, Los Angeles2020–2020

Lam Research (Austria)2014–2025

Top Works

Overview of atomic layer etching in the semiconductor industry

Keren J. Kanarik,Thorsten Lill,et al.

2015586 citations

Copper Interconnects and Reliability

Metal and Thin Film Mechanics

Predicting synergy in atomic layer etching

Keren J. Kanarik,Samantha Tan,et al.

2017121 citations

Thermal atomic layer etching: A review

Andreas Fischer,Aaron Routzahn,et al.

2021117 citations

Future of plasma etching for microelectronics: Challenges and opportunities

G. S. Oehrlein,Stephan M. Brandstadter,et al.

2024117 citations

Reducing damage to Si substrates during gate etching processes by synchronous plasma pulsing

Camille Petit‐Etienne,Maxime Darnon,et al.

201073 citations

Mechanisms involved in HBr and Ar cure plasma treatments applied to 193 nm photoresists

E. Pargon,K. Menguelti,et al.

200971 citations

Directional etch of magnetic and noble metals. II. Organic chemical vapor etch

Jack Kun-Chieh Chen,Nicholas D. Altieri,et al.

201762 citations

Highly Selective Directional Atomic Layer Etching of Silicon

Samantha Tan,Wenbing Yang,et al.

201547 citations

The Cutting Edge of Plasma Etching

Thorsten Lill,O. Joubert

200844 citations