Calculations of electron inelastic mean free paths. X. Data for 41 elemental solids over the 50 eV to 200 keV range with the relativistic full Penn algorithm

We have calculated inelastic mean free paths (IMFPs) for 41 elemental solids (Li, Be, graphite, diamond, glassy C, Na, Mg, Al, Si, K, Sc, Ti, V, Cr, Fe, Co, Ni, Cu, Ge, Y, Nb, Mo, Ru, Rh, Pd, Ag, In, Sn, Cs, Gd, Tb, Dy, Hf, Ta, W, Re, Os, Ir, Pt, Au, and Bi) for electron energies from 50 eV to 200 keV. The IMFPs were calculated from measured energy loss functions for each solid with a relativistic version of the full Penn algorithm. The calculated IMFPs could be fitted to a modified form of the relativistic Bethe equation for inelastic scattering of electrons in matter for energies from 50 eV to 200 keV. The average root‐mean‐square (RMS) deviation in these fits was 0.68%. The IMFPs were also compared with IMFPs from a relativistic version of our predictive Tanuma, and Powell and Penn (TPP‐2M) equation that was developed from a modified form of the relativistic Bethe equation. In these comparisons, the average RMS deviation was 11.9% for energies between 50 eV and 200 keV. This RMS deviation is almost the same as that found previously in a similar comparison for the 50 eV to 30 keV range (12.3%). Relatively large RMS deviations were found for diamond, graphite, and cesium as in our previous comparisons. If these three elements were excluded in the comparisons, the average RMS deviation was 8.9% between 50 eV and 200 keV. The relativistic TPP‐2M equation can thus be used to estimate IMFPs in solid materials for energies between 50 eV and 200 keV. We found satisfactory agreement between our calculated IMFPs and those from recent calculations and from measurements at energies of 100 and 200 keV. Copyright © 2015 John Wiley & Sons, Ltd.