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Shigeo Tanuma | Researchclopedia

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Shigeo Tanuma

National Institute for Materials Science ORCID

213

Works

11,012

Citations

33

h-index

66

i10-index

Research Topics

Electron and X-Ray Spectroscopy Techniques X-ray Spectroscopy and Fluorescence Analysis Surface and Thin Film Phenomena

Affiliations

Setsunan University2002–2002

University of Science and Technology of China2020–2022

Dai Nippon Printing (Japan)1991–1992

Tokuyama (Japan)2002–2002

National Institute of Standards and Technology1987–2008

Top Works

Calculations of electron inelastic mean free paths. V. Data for 14 organic compounds over the 50–2000 eV range

Shigeo Tanuma,C. J. Powell,et al.

19942,693 citations

Semiconductor materials and devices

Advancements in Photolithography Techniques

Calculations of electorn inelastic mean free paths. II. Data for 27 elements over the 50–2000 eV range

Shigeo Tanuma,C. J. Powell,et al.

19911,185 citations

Calculations of electron inelastic mean free paths for 31 materials

Shigeo Tanuma,C. J. Powell,et al.

1988932 citations

Calculations of electron inelastic mean free paths. IX. Data for 41 elemental solids over the 50 eV to 30 keV range

Shigeo Tanuma,C. J. Powell,et al.

2010887 citations

Calculations of electron inelastic mean free paths. III. Data for 15 inorganic compounds over the 50–2000 eV range

Shigeo Tanuma,C. J. Powell,et al.

1991616 citations

Calculation of electron inelastic mean free paths (IMFPs) VII. Reliability of the TPP‐2M IMFP predictive equation

Shigeo Tanuma,C. J. Powell,et al.

2003464 citations

Calculations of electron inelastic mean free paths (IMFPS). IV. Evaluation of calculated IMFPs and of the predictive IMFP formula TPP‐2 for electron energies between 50 and 2000 eV

Shigeo Tanuma,C. J. Powell,et al.

1993428 citations

Calculations of electron inelastic mean free paths

Shigeo Tanuma,C. J. Powell,et al.

2005402 citations

Calculations of electron inelastic mean free paths. X. Data for 41 elemental solids over the 50 eV to 200 keV range with the relativistic full Penn algorithm

Hiroshi Shinotsuka,Shigeo Tanuma,et al.

2015364 citations