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MEMS on cavity-SOI wafers

200731 citationsJournal Article

Authors

Hannu Luoto · Tieto (Finland)

Kimmo Henttinen · Tieto (Finland)

Tommi Suni · Tieto (Finland)

James Dekker · Tieto (Finland)

Jari Mäkinen · Okmetic (Finland)

Topics & Keywords

Advanced MEMS and NEMS Technologies Photonic and Optical Devices Acoustic Wave Resonator Technologies

Publication Details

Published in: Solid-State Electronics

Volume 51, Issue 2, pp. 328-332

DOI: 10.1016/j.sse.2007.01.007

Field-Weighted Citation Impact: 2.50

MEMS on cavity-SOI wafers | Researchclopedia