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Low-energy mass-separated ion beam deposition of materials

198155 citationsJournal Article

Authors

Takeshi Tokuyama · Hitachi (Japan)

Kunihiro Yagi · Hitachi (Japan)

Kiyoshi Miyake · Hitachi (Japan)

M. Tamura · Hitachi (Japan)

N. Natsuaki · Hitachi (Japan)

S. Tachi · Hitachi (Japan)

Topics & Keywords

Ion-surface interactions and analysis Thin-Film Transistor Technologies Semiconductor materials and devices

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Nuclear Instruments and Methods

Volume 182-183, pp. 241-250

DOI: 10.1016/0029-554x(81)90694-7

Field-Weighted Citation Impact: 5.98

Low-energy mass-separated ion beam deposition of materials | Researchclopedia