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The influence of radiation damage on the sputtering yield of silicon | Researchclopedia

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The influence of radiation damage on the sputtering yield of silicon

198314 citationsJournal Article

Authors

J. Sielanko · Maria Curie-Skłodowska University

Mark J. Sowa · Institute of Physics

Topics & Keywords

Ion-surface interactions and analysis Integrated Circuits and Semiconductor Failure Analysis Silicon and Solar Cell Technologies

UN Sustainable Development Goals

Clean water and sanitation

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research

Volume 209-210, pp. 483-486

DOI: 10.1016/0167-5087(83)90842-6

Field-Weighted Citation Impact: 2.28