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Mark J. Sowa | Researchclopedia

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Mark J. Sowa

Veeco (United States)ORCID

38

Works

348

Citations

12

h-index

12

i10-index

Research Topics

Semiconductor materials and devices Metal and Thin Film Mechanics Diamond and Carbon-based Materials Research

Affiliations

Florida State University2020–2020

United States Naval Research Laboratory2018–2018

University of New Mexico1995–2002

Maria Curie-Skłodowska University1983–2001

Lehigh University2018–2020

Top Works

Helicon plasma source excited by a flat spiral coil

J. Stevens,Mark J. Sowa,et al.

199566 citations

Plasma Diagnostics and Applications

Ion-surface interactions and analysis

Fluorocarbon polymer deposition kinetics in a low-pressure, high-density, inductively coupled plasma reactor

Mark J. Sowa,Michael E. Littau,et al.

200043 citations

Plasma-enhanced atomic layer deposition of superconducting niobium nitride

Mark J. Sowa,Yonas T. Yemane,et al.

201629 citations

Uniformity of radio frequency bias voltages along conducting surfaces in a plasma

J. Stevens,Mark J. Sowa,et al.

199627 citations

Superconducting niobium titanium nitride thin films deposited by plasma-enhanced atomic layer deposition

Yonas T. Yemane,Mark J. Sowa,et al.

201718 citations

Plasma-enhanced atomic layer deposition of ruthenium metal on free-standing carbon nanotube forest for 3D flexible binder-less supercapacitor electrodes

Hanie Kazari,Elmira Pajootan,et al.

202315 citations

Plasma-enhanced atomic layer deposition of titanium vanadium nitride

Mark J. Sowa,Ling Ju,et al.

201815 citations

Effects of deposition temperature on the wear behavior and material properties of plasma enhanced atomic layer deposition (PEALD) titanium vanadium nitride thin films

Kylie E. Van Meter,Md Istiaque Chowdhury,et al.

202314 citations

The influence of radiation damage on the sputtering yield of silicon

J. Sielanko,Mark J. Sowa

198314 citations