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Mark J. Sowa | Researchclopedia
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Mark J. Sowa
Veeco (United States)
ORCID
Top Works
Plasma Diagnostics and Applications
Ion-surface interactions and analysis
Fluorocarbon polymer deposition kinetics in a low-pressure, high-density, inductively coupled plasma reactor
Mark J. Sowa
,
Michael E. Littau
,
et al.
2000
43 citations