Nonequilibrium solid solutions obtained by heavy ion implantation and laser annealing

Nonequilibrium solid solubility of P, As, and B in single-crystalline silicon annealed by Q-switched ruby laser pulse irradiation was experimentally investigated for residual defects, lattice strain, and electrical activation of implanted impurities. The maximum solubility obtained without any macroscopically extended defect formation was 2–4 times higher than the thermal equilibrium solubility limit. Above this solubility, precipitates, dislocations, and surface cracks were observed. The highest full activation was realized by P implantation, with carrier concentration up to ∼5×1021/cm3 showing no such defects. Formation mechanisms of the defects are discussed and shown to be attributable to the rapid solidification process of the heavily doped layer and to large impurity-induced misfit stress comparable to the fracture stress.