Two-dimensional self-consistent fluid simulation of radio frequency inductive sources

The two-dimensional (R−Z) electromagnetic code fmrz has been used to model inductive sources self-consistently in time. The code models an argon plasma with momentum transfer, excitation, and ionization as electron–neutral reactions and momentum transfer for the ion–neutral reactions. The electrons and ions are treated as fluid species and a reduced set of Maxwell’s equations is used to advance the electromagnetic fields. The set of equations used in fmrz is not subject to typical numerical constraints present in many time dynamic codes, allowing one to choose appropriate time and space scales to resolve only the frequencies and scale lengths of interest. The model retains nonlinear driving terms which give rise to a ponderomotive force that distorts the density profile. Density and power profiles show the physical effects of various terms in the equations. Trends in average density and temperature compare well with an analytic model and other simulation models.