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Vahid Vahedi | Researchclopedia

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Vahid Vahedi

Iran University of Medical Sciences ORCID

135

Works

4,750

Citations

27

h-index

37

i10-index

Research Topics

Plasma Diagnostics and Applications Semiconductor materials and devices Electrostatic Discharge in Electronics

Affiliations

Lawrence Livermore National Laboratory1994–1997

Berkeley College1992–1992

Iran University of Medical Sciences2020–2025

University of Melbourne2014–2014

Lam Research (Austria)1997–2018

Top Works

A Monte Carlo collision model for the particle-in-cell method: applications to argon and oxygen discharges

Vahid Vahedi,M. Surendra

19951,018 citations

Particle accelerators and beam dynamics

Metal and Thin Film Mechanics

Overview of atomic layer etching in the semiconductor industry

Keren J. Kanarik,Thorsten Lill,et al.

2015586 citations

Simultaneous Potential and Circuit Solution for 1D Bounded Plasma Particle Simulation Codes

John Verboncoeur,M. V. Alves,et al.

1993451 citations

Ion energy distributions in rf sheaths; review, analysis and simulation

Emi Kawamura,Vahid Vahedi,et al.

1999365 citations

Capacitive RF discharges modelled by particle-in-cell Monte Carlo simulation. I. Analysis of numerical techniques

Vahid Vahedi,G. DiPeso,et al.

1993201 citations

Analytic model of power deposition in inductively coupled plasma sources

Vahid Vahedi,M. A. Lieberman,et al.

1995188 citations

Verification of frequency scaling laws for capacitive radio-frequency discharges using two-dimensional simulations*

Vahid Vahedi,C.K. Birdsall,et al.

1993175 citations

Simultaneous Potential and Circuit Solution for Two-Dimensional Bounded Plasma Simulation Codes

Vahid Vahedi,G. DiPeso

1997152 citations

Modeling electronegative plasma discharges

A. J. Lichtenberg,Vahid Vahedi,et al.

1994141 citations