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LPCVD Growth and Structural Properties of 4H-SiC Epitaxial Layers

200017 citationsJournal Article

Authors

Hidekazu Tsuchida · Central Research Institute of Electric Power Industry

Isaho Kamata · Central Research Institute of Electric Power Industry

Tamotsu Jikimoto · Central Research Institute of Electric Power Industry

Kunikaza Izumi · Central Research Institute of Electric Power Industry

Topics & Keywords

Silicon Carbide Semiconductor Technologies Copper Interconnects and Reliability Induction Heating and Inverter Technology

Publication Details

Published in: Materials science forum

Volume 338-342, pp. 145-148

DOI: 10.4028/www.scientific.net/msf.338-342.145

Field-Weighted Citation Impact: 5.85

LPCVD Growth and Structural Properties of 4H-SiC Epitaxial Layers | Researchclopedia