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A 3D micromechanical compass

200787 citationsJournal Article

Authors

Jukka Kyynäräinen · VTT Technical Research Centre of Finland

Jaakko Saarilahti · VTT Technical Research Centre of Finland

H. Kattelus · VTT Technical Research Centre of Finland

Anu Kärkkäinen · VTT Technical Research Centre of Finland

Tor Meinander · VTT Technical Research Centre of Finland

A. Oja · VTT Technical Research Centre of Finland

Topics & Keywords

Advanced MEMS and NEMS Technologies Mechanical and Optical Resonators Acoustic Wave Resonator Technologies

UN Sustainable Development Goals

Affordable and clean energy

Publication Details

Published in: Sensors and Actuators A Physical

Volume 142, Issue 2, pp. 561-568

DOI: 10.1016/j.sna.2007.08.025

Field-Weighted Citation Impact: 1.43

A 3D micromechanical compass | Researchclopedia

· VTT Technical Research Centre of Finland

Heikki Seppä · VTT Technical Research Centre of Finland

Mika Suhonen · VTT Technical Research Centre of Finland

Sami Ruotsalainen

Markku Tilli · Okmetic (Finland)