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MeV-energy B+, P+ and As+ ion implantation into Si

198793 citationsJournal Article

Authors

M. Tamura · Hitachi (Japan)

N. Natsuaki · Hitachi (Japan)

Yasuo Wada · Hitachi (Japan)

Eisuke Mitani · Hitachi (Japan)

Topics & Keywords

Ion-surface interactions and analysis Silicon and Solar Cell Technologies Semiconductor materials and interfaces

UN Sustainable Development Goals

Life below water

Publication Details

Published in: Nuclear Instruments and Methods in Physics Research Section B Beam Interactions with Materials and Atoms

Volume 21, Issue 1-4, pp. 438-446

DOI: 10.1016/0168-583x(87)90874-3

Field-Weighted Citation Impact: 11.82

MeV-energy B+, P+ and As+ ion implantation into Si | Researchclopedia