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Advances in Scanning Force Microscopy for Dimensional Metrology

2006137 citationsJournal Article

Authors

Hans‐Ulrich Danzebrink · Physikalisch-Technische Bundesanstalt

Ludger Koenders · Physikalisch-Technische Bundesanstalt

Günter Wilkening · Physikalisch-Technische Bundesanstalt

Andrew Yacoot · National Physical Laboratory

H. Kunzmann · Physikalisch-Technische Bundesanstalt

Topics & Keywords

Force Microscopy Techniques and Applications Surface Roughness and Optical Measurements Advanced Surface Polishing Techniques

UN Sustainable Development Goals

Industry, innovation and infrastructure

Publication Details

Published in: CIRP Annals

Volume 55, Issue 2, pp. 841-878

DOI: 10.1016/j.cirp.2006.10.010

Field-Weighted Citation Impact: 5.70

Advances in Scanning Force Microscopy for Dimensional Metrology | Researchclopedia