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Polytype stability in seeded sublimation growth of 4H–SiC boules

200071 citationsJournal Article

Authors

Rositza Yakimova · Linköping University

Mikael Syväjärvi · Linköping University

Tihomir Iakimov

Henrik Jacobsson · Linköping University

R Råback · CSC - IT Center for Science (Finland)

A. Vehanen · Okmetic (Finland)

Erik Janzén · Linköping University

Topics & Keywords

Silicon Carbide Semiconductor Technologies Advanced ceramic materials synthesis Copper Interconnects and Reliability

Publication Details

Published in: Journal of Crystal Growth

Volume 217, Issue 3, pp. 255-262

DOI: 10.1016/s0022-0248(00)00488-7

Field-Weighted Citation Impact: 2.28

Polytype stability in seeded sublimation growth of 4H–SiC boules | Researchclopedia