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History of atomic layer deposition and its relationship with the American Vacuum Society
2013
104 citations
Journal Article
bronze Open Access
Field-Weighted Citation Impact:
6.15
History of atomic layer deposition and its relationship with the American Vacuum Society | Researchclopedia
·
University of Helsinki
Paul Poodt
·
Holst Centre (Netherlands)
Mikko Ritala
·
University of Helsinki
Steven M. Rossnagel