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Steven M. George | Researchclopedia

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Steven M. George

University of Colorado Boulder ORCID

649

Works

43,075

Citations

102

h-index

413

i10-index

Research Topics

Semiconductor materials and devices Electronic and Structural Properties of Oxides Catalytic Processes in Materials Science

Affiliations

Pohang University of Science and Technology2009–2009

Defense Advanced Research Projects Agency2008–2012

Argonne National Laboratory2020–2020

Lawrence Livermore National Laboratory1978–1978

United States Naval Research Laboratory2021–2021

Top Works

Atomic Layer Deposition: An Overview

Steven M. George

20095,580 citations

Copper Interconnects and Reliability

Advanced Chemical Physics Studies

Low-Temperature Al<sub>2</sub>O<sub>3</sub> Atomic Layer Deposition

Markus D. Groner,F. Fabreguette,et al.

20041,350 citations

Electrical characterization of thin Al2O3 films grown by atomic layer deposition on silicon and various metal substrates

Markus D. Groner,Jeffrey W. Elam,et al.

2002719 citations

Surface Chemistry for Atomic Layer Growth

Steven M. George,A. W. Ott,et al.

1996673 citations

Conformal Coating on Ultrahigh-Aspect-Ratio Nanopores of Anodic Alumina by Atomic Layer Deposition

Jeffrey W. Elam,Dmitri Routkevitch,et al.

2003616 citations

Hydrogen desorption kinetics from monohydride and dihydride species on silicon surfaces

Pawan Gupta,Vicki L. Colvin,et al.

1988556 citations

Viscous flow reactor with quartz crystal microbalance for thin film growth by atomic layer deposition

Jeffrey W. Elam,Markus D. Groner,et al.

2002555 citations

Ultrathin Direct Atomic Layer Deposition on Composite Electrodes for Highly Durable and Safe Li‐Ion Batteries

Yoon Seok Jung,Andrew S. Cavanagh,et al.

2010547 citations

Al3O3 thin film growth on Si(100) using binary reaction sequence chemistry

A. W. Ott,J. W. Klaus,et al.

1997508 citations