Monolithic spiral inductors fabricated using a VLSI Cu-damascene interconnect technology and low-loss substrates

This paper presents spiral inductor structures optimized in a Cu-damascene VLSI interconnect technology with use of silicon, high-resistivity silicon (HRS), or sapphire substrates. Quality factors (Q) of 40 at 5.8 GHz for a 1.4 nH-inductor and 13 at 600 MHz for a 80 nH-inductor have been achieved.