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Challenges of nickel silicidation in CMOS technologies

201452 citationsJournal Article

Authors

N. Breil · IBM (United States)

Ahmet S. Özcan · IBM (United States)

F.H. Baumann · IBM (United States)

N. Klymko · IBM (United States)

Karen Nummy · IBM (United States)

Bing Sun · IBM (United States)

Topics & Keywords

Semiconductor materials and interfaces Semiconductor materials and devices Silicon and Solar Cell Technologies

UN Sustainable Development Goals

Industry, innovation and infrastructure

Publication Details

Published in: Microelectronic Engineering

Volume 137, pp. 79-87

DOI: 10.1016/j.mee.2014.12.013

Field-Weighted Citation Impact: 2.64

Challenges of nickel silicidation in CMOS technologies | Researchclopedia

Jean Jordan‐Sweet

Jian Yu · IBM (United States)

Frank Zhu · IBM (United States)

Shreesh Narasimha · IBM (United States)

M. Chudzik · IBM (United States)