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N. Klymko | Researchclopedia
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N. Klymko
IBM (United States)
Top Works
3D IC and TSV technologies
Metal and Thin Film Mechanics
A 300-mm wafer-level three-dimensional integration scheme using tungsten through-silicon via and hybrid Cu-adhesive bonding
F. Liu
,
R. Yu
,
et al.
2008
118 citations