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Wet-Chemical Cu Cleaning for Fine-Pitch Hybrid Bonding
2025
3 citations
Journal Article
Field-Weighted Citation Impact:
2.23
Wet-Chemical Cu Cleaning for Fine-Pitch Hybrid Bonding | Researchclopedia
Yusuke Okazaki
·
Kurita Water Industries (Japan)
Nobuko Gan
·
Kurita Water Industries (Japan)
Hideaki Iino
·
Kurita Water Industries (Japan)
Fumihiro Inoue
·
Yokohama National University
Harold Philipsen
·
IMEC