PowderMEMS® magnets as enabler for miniaturized NV based quantum sensors and quantum processor architectures

The implementation of PowderMEMS® micromagnets of varying shapes, with lateral dimensions of 700 μm and 800 μm, into 2.3 × 2.3 × 0.525 mm 3 silicon chips has been demonstrated successfully. These chips have been utilized as functionalized interposer for micro-scaled quantum devices. PowderMEMS® micromagnets offer a high biasing magnetic field flux density ranging from 30 mT to 35 mT over a distance of 100 μm depending on the size and shape of the micromagnets. This magnetic field strength ( B Z ) was proven by room temperature ODMR measurements with NV centers in diamond: B Z was measured over a range of distances, extending to 6 mm from the center of the micromagnets. The evaluation involved the analysis of Zeeman splitting. Furthermore, a Hall measurement setup was employed to map the lateral distribution of the magnetic field strength. • Micromachined silicon interposer with PowderMEMS magnets. • High biasing magnetic field strength demonstrated using NV centers in diamond. • Enabling technology for quantum applications providing magnetic field (gradient).