Data-Driven Model-Based Optical Proximity Correction with Image-to-Image Translation

20250 citationsJournal Articlegold Open Access

Authors

Andrei F. Moskovtsev · Moscow Institute of Physics and Technology

Evgeny Gornev · Research Institute of Molecular Electronics

Ekaterina L. Klochkova · Research Institute of Molecular Electronics

Vladimir V. Ivanov · Research Institute of Molecular Electronics

Abstract

This study introduces an end-to-end image-to-image translation framework for model-based optical proximity correction (MB-OPC) and a vector-domain post-processing pipeline that improves the manufacturability of neural network predictions. The proposed

Topics & Keywords

Advancements in Photolithography Techniques Generative Adversarial Networks and Image Synthesis Advanced Vision and Imaging

Publication Details

DOI: 10.36227/techrxiv.176704477.75290918/v1

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Data-Driven Model-Based Optical Proximity Correction with Image-to-Image Translation

Authors

Abstract

Topics & Keywords

Publication Details