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Research Institute of Molecular Electronics | Researchclopedia
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Research Institute of Molecular Electronics
Zelenograd, Moscow
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Advancements in Semiconductor Devices and Circuit Design
Copper Interconnects and Reliability
Photonic and Optical Devices
Plasma Diagnostics and Applications
Neuroscience and Neural Engineering
Integrated Circuits and Semiconductor Failure Analysis
VLSI and Analog Circuit Testing
Radio Frequency Integrated Circuit Design
Advanced Surface Polishing Techniques
Xiaochen Dong
Wenzhou Medical University
393 works
31,079 citations
h-index: 97
Fluorocarbon (C4F8) assisted plasma-enhanced atomic layer etching (PEALE) of SiO2 with high repeatability of cycles in industrial ICP reactor. I. experiment
D. V. Lopaev
,
D. R. Shibanov
,
et al.
2026
1 citations