High-power and ultrashort IR-driver platform for industrial coherent XUV metrology

20260 citationsJournal Article

Authors

Quentin Mocaer · Amplitude Technologies (France)

Antoine Comby · Amplitude Technologies (France)

Florent Guichard · Amplitude Technologies (France)

Clemens Hönninger · Amplitude Technologies (France)

S. Renard · Amplitude Technologies (France)

Jean Charbrerie · Amplitude Technologies (France)

Adrien Feytout

Abstract

We report on the development of a robust 100W and 35fs IR platform to efficiently generate coherent XUV radiations down to 140eV. The secondary photon flux is used to performed ptychographic imaging of nanometric structures on semiconductor-wafers.

Topics & Keywords

Advanced X-ray Imaging Techniques Photorefractive and Nonlinear Optics Optical Systems and Laser Technology

Publication Details

DOI: 10.1117/12.3080580

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High-power and ultrashort IR-driver platform for industrial coherent XUV metrology

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Abstract

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Publication Details