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S. H. Park | Researchclopedia

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S. H. Park

5

Works

56

Citations

2

h-index

2

i10-index

Research Topics

Copper Interconnects and Reliability 3D IC and TSV technologies Semiconductor materials and interfaces

Affiliations

Korea Institute of Fusion Energy2019–2019

IMEC2020–2026

Top Works

Inflection points in interconnect research and trends for 2nm and beyond in order to solve the RC bottleneck

Zs. Tôkei,V. Vega,et al.

202030 citations

Physics of Superconductivity and Magnetism

Carbon Nanotubes in Composites

Overview of verification tests on AC loss, contact resistance and mechanical properties of ITER conductors with transverse loading up to 30 000 cycles

K. A. Yagotintsev,Wilhelm A.J. Wessel,et al.

201926 citations

Revealing the Origins of Thermally Induced Anomaly in 18 nm Pitch Ruthenium Nanointerconnects on 300 mm Wafers

Asif A. Shah,Gilles Delie,et al.

20260 citations

Semi-damascene FSAV: Via CD and Overlay Process Window Analysis

Yannick Hermans,Giulio Marti,et al.

20260 citations

Demonstration of 16nm Pitch Two Metal Level Fully Self-Aligned Via Ru Interconnects

Gilles Delie,Stefan Decoster,et al.

20250 citations