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R. J. Quickle | Researchclopedia

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R. J. Quickle

IBM (United States)

6

Works

103

Citations

4

h-index

2

i10-index

Research Topics

Advancements in Photolithography Techniques Electron and X-Ray Spectroscopy Techniques Advanced Surface Polishing Techniques

Affiliations

IBM (United States)1993–2001

Top Works

Projection reduction exposure with variable axis immersion lenses: Next generation lithography

H. C. Pfeiffer,R. S. Dhaliwal,et al.

199961 citations

Surface Roughness and Optical Measurements

Integrated Circuits and Semiconductor Failure Analysis

EL-4, a new generation electron-beam lithography system

H. C. Pfeiffer,Donald Edward Davis,et al.

199322 citations

Performance enhancements on IBM’s EL-4 electron-beam lithography system

R. Butsch,W. A. Enichen,et al.

19958 citations

EL5: One tool for advanced x-ray and chrome on glass mask making

M. A. Sturans,John G. Hartley,et al.

19987 citations

PREVAIL e-beam stepper alpha tool

H. C. Pfeiffer,R. S. Dhaliwal,et al.

20013 citations

<title>PREVAIL-EPL alpha tool electron optics subsystem</title>

H. C. Pfeiffer,Rajinder Singh Dhaliwal,et al.

20012 citations