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PREVAIL e-beam stepper alpha tool | Researchclopedia

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PREVAIL e-beam stepper alpha tool

20013 citationsJournal Article

Authors

H. C. Pfeiffer · IBM (United States)

R. S. Dhaliwal · IBM (United States)

S. D. Golladay · IBM (United States)

Samuel Doran · IBM (United States)

Michael Gordon · IBM (United States)

Rodney Kendall · IBM (United States)

J. E. Lieberman ·

Topics & Keywords

Advancements in Photolithography Techniques Advanced Surface Polishing Techniques Electron and X-Ray Spectroscopy Techniques

Publication Details

Published in: Microelectronic Engineering

Volume 57-58, pp. 163-172

DOI: 10.1016/s0167-9317(01)00508-1

Field-Weighted Citation Impact: 0.87

IBM (United States)

D. J. Pinckney · IBM (United States)

R. J. Quickle · IBM (United States)

Chris Robinson · IBM (United States)

James Donald Rockrohr · IBM (United States)

W. Stickel · IBM (United States)

E. V. Tressler · IBM (United States)

Akikazu Tanimoto · Nikon (Japan)

Takashi Yamaguchi · Nikon (Japan)

Kazuya Okamoto · Nikon (Japan)

Kosuke Suzuki · Nikon (Japan)

Takaharu Miura · Nikon (Japan)

Teruaki Okino · Nikon (Japan)

Shintaro Kawata · Nikon (Japan)

Kenji Morita · Nikon (Japan)

Shingo Suzuki · Nikon (Japan)

Hiroaki Shimizu · Nikon (Japan)

Soichi Kojima · Nikon (Japan)

G. L. Varnell · Nikon (United States)

W. T. Novak · Nikon (United States)

M. R. Sogard · Nikon (United States)