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K. Petersen

132

Works

7,913

Citations

34

h-index

74

i10-index

Research Topics

Advanced MEMS and NEMS Technologies Muon and positron interactions and applications Mechanical and Optical Resonators

Affiliations

Russian Academy of Sciences1971–1978

IBM (United States)1976–1982

National Yang Ming Chiao Tung University2021–2021

Nagoya Institute of Technology2021–2021

Deutsches Elektronen-Synchrotron DESY2016–2016

Top Works

Silicon as a mechanical material

19822,858 citations

K. Petersen | Researchclopedia

Microfluidic and Capillary Electrophoresis Applications

Risk and Safety Analysis

Bulk micromachining of silicon

G.T.A. Kovacs,N.I. Maluf,et al.

1998718 citations

Dynamic micromechanics on silicon: Techniques and devices

1978391 citations

Micromechanical Membrane Switches on Silicon

1979313 citations

Young’s modulus measurements of thin films using micromechanics

K. Petersen,C. R. Guarnieri

1979295 citations

Silicon Torsional Scanning Mirror

1980225 citations

Effect of Voids on Angular Correlation of Positron Annihilation Photons in Molybdenum

Ole Mogensen,K. Petersen,et al.

1972202 citations

Silicon fusion bonding and deep reactive ion etching: a new technology for microstructures

E.H. Klaassen,K. Petersen,et al.

1996192 citations

Rapid, Automated Nucleic Acid Probe Assays Using Silicon Microstructures for Nucleic Acid Concentration

L. A. Christel,K. Petersen,et al.

1999155 citations