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Lam Research (United States) | Researchclopedia

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Lam Research (United States)

Fremont, Californiacompany

1,151

Works

57,918

Citations

115

h-index

Top Research Topics

Semiconductor materials and devices Copper Interconnects and Reliability Plasma Diagnostics and Applications

Top Researchers

H Ross Anderson

141 works87,500 citationsh-index: 71

Recent Research

Scientific Works by M. I. Rabinovich and Modern Theory of Oscillations and Waves

I. S. Aranson,A. I. Malekhanov,et al.

20260 citations

Metal and Thin Film Mechanics

Advancements in Photolithography Techniques

Advanced Surface Polishing Techniques

Integrated Circuits and Semiconductor Failure Analysis

Electronic and Structural Properties of Oxides

Advancements in Semiconductor Devices and Circuit Design

3D IC and TSV technologies

Diamond and Carbon-based Materials Research

Thin-Film Transistor Technologies

E. L. Wright UCLA Health

884 works86,515 citationsh-index: 89

D. Talukder Lam Research (United States)

178 works72,563 citationsh-index: 82

Steven M. George University of Colorado Boulder

649 works43,075 citationsh-index: 102

Peter G. Jones University of Liverpool

1,444 works42,216 citationsh-index: 103

Jian Wang Karlsruhe Institute of Technology

1,176 works41,822 citationsh-index: 85

Mass Gap, Color Screening, and Strong Coupling from Lattice Geometry

20260 citations

Plasma pretreatment to increase benzaldehyde attachment to the SiN <i>x</i> surface before atomic layer etching

Xue Wang,Ryan J. Gasvoda,et al.

20260 citations

Dry resist process development toward depth of focus improvement in high NA EUV lithography

Ching-Chung Huang,Ali Haider,et al.

20260 citations

Temperature dependence of the growth per cycle during molecular layer deposition of polyurea on plasma deposited SiO2

Wallis E. Scholl,Mingmei Wang,et al.

20260 citations

Hybrid quantum computing strategies for end-to-end atomistic modeling of etch chemistry: <i>Ab initio</i> calculations and machine learning

Gopal R. Iyer,Saravanapriyan Sriraman,et al.

20260 citations