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KLA (Israel) | Researchclopedia

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KLA (Israel)

Migdal HaEmeqcompany

178

Works

3,588

Citations

24

h-index

Top Research Topics

Advancements in Photolithography Techniques Optical Coatings and Gratings Advanced Surface Polishing Techniques

Top Researchers

Xuefei Zhou Tongji University

453 works16,107 citationsh-index: 69

Recent Research

From metrology to control: a comprehensive overlay solution for IC manufacturing and packaging challenges

Chin-Chou Kevin Huang,Yoav Grauer,et al.

20250 citations

Advanced Measurement and Metrology Techniques

Integrated Circuits and Semiconductor Failure Analysis

Surface Roughness and Optical Measurements

Industrial Vision Systems and Defect Detection

3D IC and TSV technologies

Photonic and Optical Devices

Electron and X-Ray Spectroscopy Techniques

Liquid Crystal Research Advancements

Photonic Crystals and Applications

Nathaniel Rothman United States Department of Health and Human Services

388 works14,444 citationsh-index: 65

Yaakov Weiss Hebrew University of Jerusalem

109 works9,604 citationsh-index: 30

Ibrahim Abdulhalim

334 works8,566 citationsh-index: 46

Y. Vardi KLA (Israel)

42 works8,311 citationsh-index: 20

Richard Wang New York Medical College

313 works7,992 citationsh-index: 46

Overview for Overlay Metrology Challenges and Solutions in Advanced Packaging

Roie Volkovich,Nimrod Bar-Yaakov,et al.

20250 citations

Advanced Techniques for Short Defect Repair to Improve Yield in Packaging Architectures

Adam Ginsburg,Dmitri Burshtyn

20250 citations

Optimization toward non-zero offset stability in overlay control: trends and prospects

Nadav Gutman,Bart Baudemprez,et al.

20252 citations

Contribution of optical overlay target design to non-zero offset stability

Apratim Dhar,Allan G. B. Fisher,et al.

20250 citations

Self-calibration overlay on ribbon-FET SRAM-like targets using full Mueller broadband spectroscopic ellipsometry for advanced process control

William T. Blanton,L. Parthasarathy,et al.

20250 citations