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Cobalt bottom-up contact and via prefill enabling advanced logic and DRAM technologies
2015
53 citations
Journal Article
Field-Weighted Citation Impact:
2.15
Cobalt bottom-up contact and via prefill enabling advanced logic and DRAM technologies | Researchclopedia
A. Leśniewska
·
IMEC
Lindsey Hall
·
Lam Research (United States)
Kristof Croes
·
IMEC
Linlin Zhao
·
Lam Research (United States)
J. Bömmels
·
IMEC
A. Kolics
·
Lam Research (United States)
Zs. Tôkei
·
IMEC