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Luigi Scaccabarozzi | Researchclopedia

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Luigi Scaccabarozzi

ASML (Netherlands)

25

Works

460

Citations

10

h-index

10

i10-index

Research Topics

Photonic and Optical Devices Advanced Fiber Laser Technologies Photorefractive and Nonlinear Optics

Affiliations

ASML (Netherlands)2009–2015

Stanford University2001–2008

Top Works

Efficient continuous wave second harmonic generation pumped at 1.55 µm in quasi-phase-matched AlGaAs waveguides

X. Yu,Luigi Scaccabarozzi,et al.

200586 citations

Advancements in Photolithography Techniques

Electron and X-Ray Spectroscopy Techniques

Progress on EUV pellicle development

Carmen Zoldesi,K. Bal,et al.

201483 citations

Enhanced second-harmonic generation in AlGaAs/Al_xO_y tightly confining waveguides and resonant cavities

Luigi Scaccabarozzi,M. M. Fejer,et al.

200682 citations

Investigation of EUV pellicle feasibility

Luigi Scaccabarozzi,Dan Smith,et al.

201368 citations

Aligning microcavity resonances in silicon photonic-crystal slabs using laser-pumped thermal tuning

Jun Pan,Yijie Huo,et al.

200843 citations

Growth of GaAs with orientation-patterned structures for nonlinear optics

Xiaojun Yu,Luigi Scaccabarozzi,et al.

200640 citations

An Gao,P. Rizo,et al.

14 citations

Template design and fabrication for low-loss orientation-patterned nonlinear AlGaAs waveguides pumped at 1.55μm

Xue-Jia Yu,Luigi Scaccabarozzi,et al.

200314 citations

Particle Cleaning of EUV Reticles

Luigi Scaccabarozzi,Niels A. Lammers,et al.

200911 citations