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Kapil Sawlani | Researchclopedia

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Kapil Sawlani

Lam Research (United States)ORCID

11

Works

150

Citations

3

h-index

2

i10-index

Research Topics

Laser-induced spectroscopy and plasma Plasma Diagnostics and Applications Magnetic confinement fusion research

Affiliations

University of Michigan–Ann Arbor2011–2011

Lam Research (United States)2020–2024

Top Works

2022 Review of Data-Driven Plasma Science

Rushil Anirudh,Richard Archibald,et al.

202375 citations

Plasma Applications and Diagnostics

Industrial Vision Systems and Defect Detection

Deep Learning for Classification of the Chemical Composition of Particle Defects on Semiconductor Wafers

Jared O’Leary,Kapil Sawlani,et al.

202068 citations

Perspectives on artificial intelligence for plasma-assisted manufacturing in semiconductor industry

Kapil Sawlani,Ali Mesbah

20246 citations

Effects of Secondary Electron Emission on the Plasma Sheath and Local Electron Energy Distribution with Application to Hall Thrusters.

20151 citations

2022 Review of Data-Driven Plasma Science

Rushil Anirudh,Richard Archibald,et al.

20220 citations

Aerodynamically enhanced atomospheric pressure plasma jet for polymer treatment

Kapil Sawlani,John E. Foster

20110 citations

Experimental Evidence of Change in Sheath Properties due to Secondary Electron Emission in a Crossed Field Plasma Setup

Kapil Sawlani,John E. Foster

20130 citations

Laser-Induced Fluorescence for Sheath Characterization in Low-Density Argon Plasmas

Alexander Englesbe,Kapil Sawlani,et al.

20130 citations

Alexander J. Bourque,Richard D. Braatz,et al.

20240 citations