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Keren J. Kanarik | Researchclopedia

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Keren J. Kanarik

Lam Research (United States)ORCID

25

Works

1,642

Citations

13

h-index

13

i10-index

Research Topics

Semiconductor materials and devices Plasma Diagnostics and Applications Electronic and Structural Properties of Oxides

Affiliations

Lam Research (Austria)2014–2017

Lam Research (United States)2014–2024

Top Works

Overview of atomic layer etching in the semiconductor industry

Keren J. Kanarik,Thorsten Lill,et al.

2015586 citations

Advanced Memory and Neural Computing

Advancements in Semiconductor Devices and Circuit Design

Atomic Layer Etching: Rethinking the Art of Etch

Keren J. Kanarik,Samantha Tan,et al.

2018218 citations

The grand challenges of plasma etching: a manufacturing perspective

Chris G N Lee,Keren J. Kanarik,et al.

2014174 citations

Predicting synergy in atomic layer etching

Keren J. Kanarik,Samantha Tan,et al.

2017121 citations

Future of plasma etching for microelectronics: Challenges and opportunities

G. S. Oehrlein,Stephan M. Brandstadter,et al.

2024117 citations

Human–machine collaboration for improving semiconductor process development

Keren J. Kanarik,Wojciech T. Osowiecki,et al.

2023108 citations

Atomic layer etching of GaN and AlGaN using directional plasma-enhanced approach

T. Ohba,Wenbing Yang,et al.

201773 citations

Atomic layer etching of 3D structures in silicon: Self-limiting and nonideal reactions

Chad M. Huard,Yiting Zhang,et al.

201765 citations

Highly Selective Directional Atomic Layer Etching of Silicon

Samantha Tan,Wenbing Yang,et al.

201547 citations