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S. Sen | Researchclopedia

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S. Sen

12

Works

84

Citations

5

h-index

3

i10-index

Research Topics

Advancements in Photolithography Techniques Integrated Circuits and Semiconductor Failure Analysis Ion-surface interactions and analysis

Affiliations

University of Houston1988–1996

Top Works

A proximity ion beam lithography process for high density nanostructures

J. C. Wolfe,S. V. Pendharkar,et al.

199629 citations

Electron and X-Ray Spectroscopy Techniques

Metal and Thin Film Mechanics

Silicon stencil masks for lithography below 0.25 μm by ion-projection exposure

P. E. Mauger,A. R. Shimkunas,et al.

199213 citations

High-precision motion and alignment in an ion-beam proximity printing system

D. P. Stumbo,G. A. Damm,et al.

199113 citations

Fabrication of 0.25 μm surface acoustic wave devices by ion beam proximity printing

D. P. Stumbo,S. Sen,et al.

19916 citations

Ion projector wafer exposure results at 5× ion-optical reduction obtained with nickel and silicon stencil masks

G. Stengl,G. Van den bosch,et al.

19926 citations

Low stress silicon stencil masks for sub-100 nm ion beam lithography

F.-O. Fong,D. P. Stumbo,et al.

19905 citations

Multi-level metal CMOS manufacturing with deuterium for improved hot carrier reliability

I.C. Kizilyalli,Gary R. Weber,et al.

20024 citations

High-resolution fabrication process for silicon ion masks

F-O. Fong,S. Sen,et al.

19883 citations

Fabrication of low-stress silicon stencil masks for ion beam lithography

S. Sen,F-O. Fong,et al.

19893 citations